1 ADAPTER_ESAGV ESAGV 0 0 VacPump_01 VacPump_02 VacAct_01 VacAct_02 VacAct_03 VacAct_04 Lubro_01 Lubro_02 Cooler_01 Cooler_02 Press_01 Press_02 Temp_01 Temp_02 Path_01 UnOp_01 UnOp_02 UnOp_03 UnOp_04 UnOp_05 UnOp_06 UnOp_07 UnOp_08 Axis_01 Axis_01_Type LINEAR Axis_01_Grp 00 Axis_02 Axis_02_Type LINEAR Axis_02_Grp 00 Axis_03 Axis_03_Type LINEAR Axis_03_Grp 00 Axis_04 Axis_04_Type ROTARY Axis_04_Grp 00 Axis_05 Axis_05_Type ROTARY Axis_05_Grp 00 Axis_06 Axis_06_Type LINEAR Axis_06_Grp 00 Axis_07 Axis_07_Type LINEAR Axis_07_Grp 00 Axis_08 Axis_08_Type LINEAR Axis_08_Grp 00 Axis_09 Axis_09_Type LINEAR Axis_09_Grp 00 Axis_10 Axis_10_Type LINEAR Axis_10_Grp 00 Axis_11 Axis_11_Type LINEAR Axis_11_Grp 00 Axis_12 Axis_12_Type LINEAR Axis_12_Grp 00 Axis_13 Axis_13_Type LINEAR Axis_13_Grp 00 Axis_14 Axis_14_Type LINEAR Axis_14_Grp 00 Axis_15 Axis_15_Type LINEAR Axis_15_Grp 00 MemArea_01 MemArea_02 MemArea_03 MemArea_04